Item ID: 102178

**1 Offered at Best Price**

SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER

Silicon Etcher - Year 2003

In addition to this Surface Technology Systems MXP Multiplex ICP ASE HR, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, and Trion Technology.

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories.

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER

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Location: Scotia, New York, United States

Unit Price	Unstated
Number of Units	1
Manufacturer	Surface Tech Sys
Model	MXP Multiplex ICP ASE HR
Wafer Size Range
Minimum	50 mm
Maximum	200 mm
Set Size	150 mm
Process	Silicon Etch Bosch Process
Loadlock
Loadlock Yes/No	YES
Loadlock Pump Manufacturer & Model	Edwards E2M40
High Vacuum Pump	Pfeiffer MAG 2000
Roughing Pump	Edwards IQMB250 & IQDP80
RF Generator Model	ENI/ACG-3B and Advanced Energy RFG 3001
Number of Gas Inputs	Four Gas
Process Gases	SF6, C4F8, O2, Ar
Chillers
Number of Chillers	1
Chiller #1Manufacturer/Model	Huber/Unistat 140W
Accessories	ICP V2 - Balun coil Mechanical Clamp Helium Backside Cooling Carousel in MkIV MPX - 2 x 150mm wafers 3KW Source 300/30W platen E-Rack Modules: HCL1 +HCU3 +HCU5+VAC3Y +2x AMC1 +HBC2
Other Information	Windows 2000 Bosch license Current Power Requirements: 400V , 50Hz, 40 Amp, 3 phase Unit can be configured for: 208/460, 60 Hz, 3 Phase. Please request at time of purchase.
CE Marked	YES
Year of Manufacture	2003

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).

Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions

FULL DESCRIPTION of Item 102178

1 Offered at Best Price

SURFACE TECHNOLOGY SYSTEMS STS SILICON ICP ETCHER

**1 Offered at Best Price**